Fabrication of information protection elements on the film As4Se96 by electron-beam lithography method
10.24144/2415-8038.2017.42.8-13
Suggested citation
Fabrication of information protection elements on the film As4Se96 by electron-beam lithography method
. Scientific Herald of Uzhhorod University. Series "Physics", (42), 8-13. 10.24144/2415-8038.2017.42.8-13- (not set)
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- Scientific Bulletin of Mukachevo State University. Series “Economics” - Issue 42, 2017